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Scanning Electron Microscope (SEM) Introduction

This is a page intended to serve as a general introduction to scanning electron microscopy (SEM).

Although everything here is accurate, most material covered here is covered at a superficial level. For more in-depth coverage, I would recommend Goldstein, et al.: Scanning Electron Microscopy and X-Ray Microanalysis, 2nd. Edition. My pages here are aimed at a rather low level, so please don't take this as a course in itself, but rather as an introduction so the casual student can begin to get an idea of the basics of SEM, and a beginner can learn enough to begin the actual learning. It is for the latter, (or even the more curious casual visitor) I recommend Goldstein, et al. The primary purpose of this page is to reduce my introductory level teaching load.

On to the tutorial...

Sections:

SEM components overview

(What are the big parts?)

Console!

SEM image formation

(How does that pile of stuff act as a microscope?)

 

SEM components details (detectors, etc.)

(Most of the little parts.)

SEM chamber view

Contrast mechanisms

(The wherebys of seeing stuff in the 'scope.)

 

Generic SEM operation (LAST for a VERY good reason!)

(Loading samples and the basic alignment and such common to all SEMs.)

Ben Simkin at CamScan console

Tips, hints, and how-tos:

Sample holder vices

How to do ECCI

Other microscopy resources:

Questions? Try the Microscopy Listserver Archives

Investigate the Microscopy Society of America

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© Copyright 2003 Michigan State University, Updated: July 2, 2003

 

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