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An SEM is comprised of a large number of basic systems, all
of which need to work in order for the basic machine to function.
As any user needs to understand how these things work
in order to understand how their actions (or lack of them)
can affect their results (or basic functionality of the SEM),
then this is the best place to start. I will start with the
basics and then address some of the more specific components
in a later section.
Control Console:
Most of the parts of the microscope are controlled through
the control console, as the name might suggest. Electron beam
control (electron lenses, beam deflections, electron gun controls),
image processing (linear and nonlinear signal amplification,
static framestores, image display(s)), scan generation and
synchronization, and vacuum system controls are all principally
controlled through the console. This essentially makes up
all the bits 'n pieces that constitute the SEM. A traditional
SEM console accomplishes this using dedicated electronics
for each system, all in one big box. More recent SEM designs
have attempted to save money by running most of the controls
through a PC or workstation, with control cards outputting
control signals to the circuits doing the heavy lifting. (No
PC has a 25kV power supply, for example!) One potential advantage
of this approach is to automate some operations such as stigmation,
focusing and the like through an image analysis feedback loop
in the computer. In practice, however, I have yet to see this
successfully automated. The disadvantage is usually the inability
to operate multiple controls simultaneously, greatly slowing
(and impairing) operator control. The cost savings for manufacturers
makes this a popular approach, however.
Vacuum System:
The actual 'moving' guts of the 'scope are all either in or
on the vacuum system, or a part of it. These include the electron
gun and lenses and all the active parts of beam manipulation
controls, signal collection devices, and of course, the vacuum
pumps, valves, etc.
Electron Guns:
Every electron microscope has an electron gun; this is where
the electrons come from to make it an electron microscope...
There are two basic ways of convincing electrons to leave
their nice, cozy homes where they are associated with some
atom or other. The first method is to dump enough thermal
energy in to them so that they are driven off; the second
method is to put them in a strong enough electric field so
that any of them that stray too far from home will be pulled
off. These are rather poetic ways of describing thermionic
emission and field emission strategies for an electron source.
A thermionic electron gun consists essentially of
a heated wire or compound from which electrons are given enough
thermal energy to overcome the work function of the source,
combined with an electric potential to give the newly free
electrons a direction and velocity. Common materials that
are used for these sources are Tungsten (because it has a
very high melting temperature, so more thermal energy can
be made available); LaB6; and Ce6 (because
they have both a low work function and a high melting temperature).
The heated source is usually held at some potential (anywhere
from ~500V to maybe 100kV) negative relative to ground, so
that a sample (as well as the rest of the microscope) can
be kept at ground.
A
tungsten 'hairpin" type filament.
A field emission gun consists of a sharply pointed
tungsten tip held at several kilovolts negative potential
relative to a nearby electrode, so that there is a very high
potential gradient at the surface of the tungsten tip. The
result of this is that the potential energy of an electron
as a function of distance from the metal surface has a sharp
peak (from the work function), then drops off quickly (due
to electron charge traveling through an electric field). Because
electrons are quantum particles and have a probability distribution
to their location, a certain number of electrons that are
nominally at the metal surface will find themselves at some
distance from the surface, such that they can reduce their
energy by moving further away from the surface! This
transport-via-delocalization is called 'tunneling', and is
the basis for the field emission effect.
Thermal field emitters enhance the pure field emission
effect by giving some thermal energy to the electrons in the
metal, so that the required tunneling distance is shorter
for successful escape from the surface.
A Schottky emitter is a thermal field emitter that
has been further enhanced by doping the surface of the emitter
to reduce the work function.
A Schottky field emitter assembly. The outer shiny part is the
suppressor electrode; the emitter is a tiny pinprick sticking
up through the small hole in the center of the suppressor.
Vacuum System Components:
Pressure Terminology
The units I use here are the ones I am
most comfortable with, but they can be pretty obscure
if you're not accustomed to vacuum systems. Therefore,
a quick comparison: |
1 atmosphere |
= |
760mm Hg |
= |
760 torr |
= |
1.013bar |
= |
101.3 kPa |
Thus, 1 torr is roughly 1.3 mbar or 1.3
Pa |
There are four types of vacuum pumps that
are at least somewhat commonly employed in SEMs. I will
go over the basic operational mechanisms and operational
parameters of each, then put each into their place in
a typical SEM. |
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Roughing pump/mechanical pump: This is a pretty
basic design that takes a large initial volume, squeezes
it down into a smaller volume, and expels it at the
high-pressure side. These usually involve an oil as
a lubricant and gas seal although oil-free models can
also be purchased for a considerable premium. Outlet/inlet
pressure ratios are typically on the order of 5*105
or so. The high-pressure side can operate at atmospheric
pressures, while the low-pressure side is usually limited
by the vapor pressure of the pump oil used. |
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Diffusion pump: This uses a high velocity
stream of gas molecules to kinetically 'trap' random
gas molecules from the vacuum system that blunder into
the stream. These typically consist of three stages,
each of which will support pressure ratios of approximately
10:1 or greater. The maximum pressure on the low pressure
side is typically around 100mtorr or so, while the maximum
pressure on the high pressure side is typically on the
order of (maybe) 200 mtorr. More typical operating ranges
are around 10-6 torr on the low pressure
side, with 5*10-2 torr on the high pressure
side. |
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Turbo pump: A turbo pump is essentially a
whole heck of a lot of axial compressors (ala turbine)
on really tight tolerances moving at truly frightening
speeds. These have the advantages that they have good
throughput, pump most gases about equally well, have
inlet pressure limits somewhere better than 10-8
torr, have outlet pressure limits pretty close to atmospheric
pressure (maybe 10 torr or better, I forget), and can
actually be started while being pumped down. The disadvantages
include high cost, higher frequency of maintenance required,
potential for vibration, and higher sensitivity to foreign
object damage. The typical description of a turbo pump
failure is of a brief 'scream of anguished metal', followed
by the entire vacuum system being filled with aluminum
confetti. These typically spin at 60,000-90,000 RPM
or so, so a foreign particle, bearings starting to go,
etc. will all cause a rather spectacular failure. |
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Ion pump: This is an entrapment pump, so there
is only an inlet, but no outlet pressure. An ion pump
works by ionizing any and all stray molecules or atoms
that fall into it, then reacting these with (or burying
them in) a chunk of metal. Typically these can be thought
of as two parallel plates of titanium held at something
like 5kV potential relative to each other. When an unsuspecting
neutral atom/molecule bumps the + electrode, it suddenly
becomes one or more + ions itself, which are then accelerated
through the potential between the plates, smacking into
the - electrode. As titanium is a very reactive metal,
most species will simply form a compound with a nice
low vapor pressure, effectively removing them from the
pumped volume. The non-reactive species (say Ar) will
tend to simply get buried in the Ti, struggling in vain
until doomsday to escape their confinement. (Ah, the
cruelties of an ion pump!)
Most ion pumps are more involved than the simplified
form presented here, but this covers the basic idea.
Typical refinements include magnets to promote sputtering
(new Ti surface) or evaporation of Ti (again, more new
Ti surface).
A typical ion pump will actually start to function
around 10-5 torr or so, but this is really
abusive. More typical (better operation) upper pressure
limits are more on the order of 10-6 to 10-7
torr. For a pretty new, nicely cared-for ion pump in
a really tight system, numbers like 10-12
torr can be achieved. Usually for SEM work (open vacuum
system, rubber seals, people abusing the poor things),
10-7 to 10-9 torr are more common. |
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