- Turn on the console power.
- Sign in the logbook.
- Fill the l N2 dewar for the EDS detector,
even if you are not planning on doing EDS. (Remember
to sign the l N2 log book.)
- Prep your samples, stages, whatever, so they are ready
to load. (The S2500 stage is set up for the Hitachi tapped
stubs. You can buy these, or make them yourself: drill metal
disks, and tap the holes with a 4M.70 tap. DO NOT
just stick a piece of tape to the substage assembly.)
If loading through the airlock:
- Move the stage to the airlock exchange position.
- Vent the airlock.
- Open outer airlock door, and slide the airlock assembly
out.
- Slide the substage assembly out of the airlock assembly
and screw the stub onto the substage.
- Slide the substage back into the airlock assembly, then
close the airlock.
- While pressing the airlock closed, pump down the airlock.
- Wait until green light comes on.
- Open the inner airlock door and insert the substage into
the stage. (You may need to adjust the stage z and rotation
controls to get the substage to fit.)
- Unscrew the substage from the transfer arm, pull the transfer
arm out of the chamber, and close the inner airlock door.
If loading through the main chamber door:
- Vent the chamber.
- Pull out the chamber door+stage assembly. Load sample
onto stage. Close chamber door.
- While pushing the chamber door closed, pump down the chamber.
Note: Things like focusing, stigmation, contrast/brightness
adjustment, etc. can (and should!) be done as needed throughout
this process.
- Check that the green 'high vac' light on the gun valve
assembly is on.
- Set the acceleration voltage from the on-screen menu.
- Set an initial working distance from the menu.
- Open the gun isolation valve by twisting the control bar
clockwise, pulling gently out, then turning counterclockwise.
- 5-10 seconds after this, a green light on the control
console will begin blinking. Wait for the blinking to stop
at a steady green light.
- Turn on the acceleration voltage.
- At the rate of 1/2 notch every 30
seconds, raise the filament heating current until the emission
current meter does not rise very much after each adjustment
(typically around the 2-3 o'clock position for the heating
current knob).
- Adjust the contrast and brightness knobs until you have
a decent image.
- Focus.
- Find some convenient feature on your sample to focus/align
with. (Specks of dust <=1mm across
are good for this, but the initial stages may require something
larger.)
- Turn on the beam wobbler (labeled 'aperture align' on
the console).
- Adjust aperture so as to minimize apparent motion of feature
as it goes in and out of focus. Turn off wobbler.
- Correct astigmatism.
- Lower the filament heating current at a rate of 1 notch
per 30 seconds.
- Turn off the acceleration voltage.
- Close the gun isolation valve.
- Remove your sample.
- Sign out on the logbook. Include sample details, etc.
- Shut down the console power.
|